fig1

Figure 1. Effect of electrode nitridation on interfacial microstructure and electrical properties. (A) Schematic illustrations depict the phase evolution from body-centered cubic Mo to rock-salt-type MoN_x and the corresponding reliability mechanisms; (B) X-ray diffraction patterns of Mo, 05MoN, 52MoN, and 79MoN thin films. The inset displays the full-scale intensity of the pure Mo film, showing the untruncated Mo (110) diffraction peak; (C) Lattice-matching models were constructed to evaluate the compatibility between orthorhombic Hf_0.5Zr_0.5O₂ (HZO) (111), denoted as 111O and B1-MoN (111). The supercells, indicated by red dashed boxes, represent a 5:6 domain-matching configuration (left) and a 3:5 matching configuration (right); Electrical characteristics evaluated by (D) four-point probe resistivity measurements and (E) work function (Φ) values extracted from ultraviolet photoelectron spectroscopy.