fig4

Measurement of silicon carbide epilayer thickness using physics-informed neural networks and hybrid intelligent systems

Figure 4. Algorithm flowchart of the UAHIS. τm is the material-specific threshold, and u is the prediction uncertainty obtained from Monte Carlo Dropout. UAHIS: Uncertainty-Aware Hybrid Intelligent System; AE-PINN: attention-enhanced physics-informed neural network.

Intelligence & Robotics
ISSN 2770-3541 (Online)

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