fig1

Measurement of silicon carbide epilayer thickness using physics-informed neural networks and hybrid intelligent systems

Figure 1. Schematic diagram of the multi-beam interference measurement principle (incident angle α and refraction angle β are marked).

Intelligence & Robotics
ISSN 2770-3541 (Online)

Portico

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Portico

All published articles are preserved here permanently:

https://www.portico.org/publishers/oae/