REFERENCES
1. Moreaux, L. C.; Yatsenko, D.; Sacher, W. D.; et al. Integrated neurophotonics: toward dense volumetric interrogation of brain circuit activity-at depth and in real time. Neuron 2020, 108, 66-92.
2. Zhao, H.; Yue, H.; Chou, W.; et al. Optogenetic technology: breakthroughs and challenges from basic research to clinical translation. Adv. Photon. 2025, 7, 054001.
3. Lu, Q.; Sun, Y.; Liang, Z.; Zhang, Y.; Wang, Z.; Mei, Q. Nano-optogenetics for disease therapies. ACS. Nano. 2024, 18, 14123-44.
4. Zhang, Q.; Li, T.; Xu, M.; Islam, B.; Wang, J. Application of optogenetics in neurodegenerative diseases. Cell. Mol. Neurobiol. 2024, 44, 57.
5. Kim, J.; Gilbert, E.; Arndt, K.; et al. Multifunctional tetrode-like drug delivery, optical stimulation, and electrophysiology (Tetro-DOpE) probes. Biosens. Bioelectron. 2024, 265, 116696.
6. Jiang, S.; Patel, D. C.; Kim, J.; et al. Spatially expandable fiber-based probes as a multifunctional deep brain interface. Nat. Commun. 2020, 11, 6115.
7. Park, S.; Yuk, H.; Zhao, R.; et al. Adaptive and multifunctional hydrogel hybrid probes for long-term sensing and modulation of neural activity. Nat. Commun. 2021, 12, 3435.
8. Huang, S.; Liu, X.; Lin, S.; et al. Control of polymers’ amorphous-crystalline transition enables miniaturization and multifunctional integration for hydrogel bioelectronics. Nat. Commun. 2024, 15, 3525.
9. Spagnolo, B.; Balena, A.; Peixoto, R. T.; et al. Tapered fibertrodes for optoelectrical neural interfacing in small brain volumes with reduced artefacts. Nat. Mater. 2022, 21, 826-35.
10. Sahasrabudhe, A.; Rupprecht, L. E.; Orguc, S.; et al. Multifunctional microelectronic fibers enable wireless modulation of gut and brain neural circuits. Nat. Biotechnol. 2024, 42, 892-904.
11. Sparta, D. R.; Stamatakis, A. M.; Phillips, J. L.; Hovelsø, N.; van Zessen, R.; Stuber, G. D. Construction of implantable optical fibers for long-term optogenetic manipulation of neural circuits. Nat. Protoc. 2011, 7, 12-23.
12. Mohit, F.; Ricciardi, A.; Cusano, A.; Cutolo, A. Tapered multicore optical fiber probe for optogenetics. Results. Opt. 2021, 4, 100109.
13. Du, Y.; Turtaev, S.; Leite, I. T.; et al. Hybrid multimode - multicore fibre based holographic endoscope for deep-tissue neurophotonics. Light. Adv. Manuf. 2022, 3, 408-16.
14. Pisanello, F.; Sileo, L.; Oldenburg, I. A.; et al. Multipoint-emitting optical fibers for spatially addressable in vivo optogenetics. Neuron 2014, 82, 1245-54.
15. Packer, A. M.; Russell, L. E.; Dalgleish, H. W.; Häusser, M. Simultaneous all-optical manipulation and recording of neural circuit activity with cellular resolution in vivo. Nat. Methods. 2015, 12, 140-6.
16. Kim, T. I.; McCall, J. G.; Jung, Y. H.; et al. Injectable, cellular-scale optoelectronics with applications for wireless optogenetics. Science 2013, 340, 211-6.
17. Gu, W.; Wang, L.; Wang, X.; Zhao, C.; Guan, S. Large-scale, high-density microLED array-based optogenetic device for neural stimulation and recording. Nano. Lett. 2024, 24, 15252-9.
18. Li, L.; Lu, L.; Ren, Y.; et al. Colocalized, bidirectional optogenetic modulations in freely behaving mice with a wireless dual-color optoelectronic probe. Nat. Commun. 2022, 13, 839.
19. Stujenske, J. M.; Spellman, T.; Gordon, J. A. Modeling the spatiotemporal dynamics of light and heat propagation for in vivo optogenetics. Cell. Rep. 2015, 12, 525-34.
20. Lin, R.; Guo, J.; Tong, J.; et al. Treatment of neuropathic pain after brachial plexus injury by implantable wireless charging flexible micro-LED array. Opt. Express. 2025, 33, 31819-31.
21. Cai, X.; Zhang, H.; Wei, P.; et al. A wireless optoelectronic probe to monitor oxygenation in deep brain tissue. Nat. Photon. 2024, 18, 492-500.
22. Greer, R.; Verdier, A.; Butt, E.; et al. Chronically implantable μLED arrays for optogenetic cortical surface stimulation in mice. Nat. Commun. 2026, 17, 878.
23. Yang, Y.; Wu, M.; Vázquez-Guardado, A.; et al. Wireless multilateral devices for optogenetic studies of individual and social behaviors. Nat. Neurosci. 2021, 24, 1035-45.
24. Wu, M.; Yang, Y.; Zhang, J.; et al. Patterned wireless transcranial optogenetics generates artificial perception. Nat. Neurosci. 2026, 29, 234-45.
25. Vöröslakos, M.; Kim, K.; Slager, N.; et al. HectoSTAR μLED optoelectrodes for large-scale, high-precision in vivo opto-electrophysiology. Adv. Sci. 2022, 9, e2105414.
26. Lu, J.; Zia, M.; Baig, D. A.; et al. Opto-myomatrix: μLED integrated microelectrode arrays for optogenetic activation and electrical recording in muscle tissue. bioRxiv 2025.
27. Wan, Y.; He, W.; Jaussi, J.; et al. Integrating silicon photonics with complementary metal–oxide–semiconductor technologies. Nat. Rev. Electr. Eng. 2026, 3, 15-31.
28. Ma, X.; Yuan, M.; Li, J.; et al. Multi-target and ultra-high-speed optical wireless communication using a thin-film lithium niobate optical phased array. Nat. Commun. 2025, 17, 969.
29. Zheng, Y.; Wang, H.; Jia, X.; et al. Large-scale quantum communication networks with integrated photonics. Nature 2026, 651, 68-75.
30. Lin, H.; Zheng, H.; Zhu, W.; et al. Multifunctional lithium niobate platform for photodetection and photoacoustic and thermoelastic gas sensing. Nat. Commun. 2026, 17, 2296.
31. Zhang, S.; Jiang, X.; Wu, B.; et al. Photonic edge intelligence chip for multi-modal sensing, inference and learning. Nat. Commun. 2025, 16, 10136.
32. Al-Kayed, N.; St-Arnault, C.; Morison, H.; et al. Programmable 200 GOPS Hopfield-inspired photonic Ising machine. Nature 2025, 648, 576-84.
33. Ashtiani, F.; Idjadi, M. H.; Kim, K. Integrated photonic neural network with on-chip backpropagation training. Nature 2026, 651, 927-32.
34. Yeh, S. K.; Shih, C. T.; Yuan, F.; et al. Silicon photonics platform for next generation data communication technologies. In Proceedings of the 2024 IEEE International Electron Devices Meeting (IEDM), San Francisco, USA. Dec 7-11, 2024. IEEE; 2024. p. 1-4.
35. Mohanty, A.; Li, Q.; Tadayon, M. A.; et al. Reconfigurable nanophotonic silicon probes for sub-millisecond deep-brain optical stimulation. Nat. Biomed. Eng. 2020, 4, 223-31.
36. Sacher, W. D.; Chen, F. D.; Moradi-Chameh, H.; et al. Optical phased array neural probes for beam-steering in brain tissue. Opt. Lett. 2022, 47, 1073-6.
37. Lakunina, A. A.; Socha, K. Z.; Ladd, A. E.; et al. Neuropixels Opto: combining high-resolution electrophysiology and optogenetics. Nat. Methods. 2026, 23, 1207-16.
38. Lv, S.; Xu, Z.; Mo, F.; et al. Long-term stability strategies of deep brain flexible neural interface. npj. Flex. Electron. 2025, 9, 410.
39. Wang, S.; Jiang, Q.; Liu, H.; et al. Mechanically adaptive and deployable intracortical probes enable long-term neural electrophysiological recordings. Proc. Natl. Acad. Sci. U. S. A. 2024, 121, e2403380121.
40. Hayati Raad, S. Perspective chapter: Optical waveguides for quantum computation. In Optical waveguide technology and and applications. Kim, K.Y., Ed.; IntechOpen: London, 2024.
41. Okamoto, K. Chapter 2 - Planar optical waveguides. In Fundamentals of optical waveguides (third edition). Academic Press: 2022; pp. 13-65.
42. Hammer, M.; Khan, S. S.; Taheri, B.; Farheen, H.; Förstner, J. TFLN channel waveguides of rib and strip type: properties of guided modes. Opt. Continuum. 2025, 4, 2356.
43. Aharonovich, I.; Crozier, K. B.; Neshev, D. Programmable integrated quantum photonics. Nat. Photon. 2026, 20, 254-65.
44. Hu, Y.; Song, Y.; Zhu, X.; et al. Integrated lithium niobate photonic computing circuit based on efficient and high-speed electro-optic conversion. Nat. Commun. 2025, 16, 8178.
45. Son, Y.; Lee, H. J.; Kim, J.; et al. In vivo optical modulation of neural signals using monolithically integrated two-dimensional neural probe arrays. Sci. Rep. 2015, 5, 15466.
46. Sacher, W. D.; Luo, X.; Yang, Y.; et al. Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers. Opt. Express. 2019, 27, 37400-18.
47. Luo, Y.; Sun, C.; Ma, H.; et al. Flexible passive integrated photonic devices with superior optical and mechanical performance. Opt. Express. 2022, 30, 26534-43.
48. Chen, Z.; Tang, Y.; Wei, M.; et al. Development of yellow-light TiO2 integrated photonics. Opt. Lett. 2025, 50, 3489-92.
49. Krutov, I. A.; Saygin, M. Y.; Dyakonov, I. V.; Kulik, S. P. Optimized low-loss integrated photonics silicon-nitride Y-branch splitter. AIP. Conf. Proc. 2020, 2241, 020027.
50. Kobayashi, M. Chapter 10 - Guided-wave optical interconnect techniques. In Photonics in switching. Academic Press: 1993; pp. 271-317.
51. Sahu, P. P. Multimode interference coupler based on general interference for integrated optical and quantum optic devices: a review. Phys. Scr. 2024, 99, 085106.
52. Wu, Y.; Wu, M.; Vázquez-Guardado, A.; et al. Wireless multi-lateral optofluidic microsystems for real-time programmable optogenetics and photopharmacology. Nat. Commun. 2022, 13, 5571.
53. Peng, Y.; Zhao, W.; Shi, Y.; Dai, D. 192-channel silicon reconfigurable optical add-drop multiplexer. In Proceedings of the 2024 IEEE Silicon Photonics Conference (SiPhotonics), Tokyo, Japan. Apr 15-18, 2024. IEEE; 2024. p. 1-2.
54. Xia, D.; Luo, L.; Wang, L.; et al. Reconfigurable chalcogenide integrated nonlinear photonics. Nat. Commun. 2025, 16, 10133.
55. Gurses, V.; Davis, S. I.; Valivarthi, R.; Sinclair, N.; Spiropulu, M.; Hajimiri, A. An on-chip phased array for non-classical light. Nat. Commun. 2025, 16, 6849.
56. Liang, G.; Huang, H.; Mohanty, A.; et al. Robust, efficient, micrometre-scale phase modulators at visible wavelengths. Nat. Photon. 2021, 15, 908-13.
57. Chen, Z.; Wei, M.; Sun, B.; et al. Flexible waveguide integrated thermo-optic switch based on TiO2 platform. Opt. Lett. 2023, 48, 3239-42.
58. Frigg, A.; Boes, A.; Ren, G.; et al. Low loss CMOS-compatible silicon nitride photonics utilizing reactive sputtered thin films. Opt. Express. 2019, 27, 37795-805.
59. Guha, B.; Cardenas, J.; Lipson, M. Athermal silicon microring resonators with titanium oxide cladding. Opt. Express. 2013, 21, 26557-63.
60. Park, H.; Jung, J.; Zhang, Y.; et al. Effects of thermally induced phase transition on the negative thermo-optic properties of atomic-layer-deposited TiO2 films. ACS. Appl. Electron. Mater. 2022, 4, 651-62.
61. Reshef, O.; Shtyrkova, K.; Moebius, M. G.; et al. Polycrystalline anatase titanium dioxide microring resonators with negative thermo-optic coefficient. J. Opt. Soc. Am. B. 2015, 32, 2288.
62. West, G. N.; Loh, W.; Kharas, D.; et al. Low-loss integrated photonics for the blue and ultraviolet regime. APL. Photonics. 2019, 4, 026101.
63. Sorace-Agaskar, C.; Kharas, D.; Yegnanarayanan, S.; et al. Versatile silicon nitride and alumina integrated photonic platforms for the ultraviolet to short-wave infrared. IEEE. J. Select. Topics. Quantum. Electron. 2019, 25, 1-15.
64. Zhong, C.; Ma, H.; Sun, C.; et al. Fast thermo-optical modulators with doped-silicon heaters operating at 2 μm. Opt. Express. 2021, 29, 23508-16.
65. Lin, X.; Ling, T.; Subbaraman, H.; Guo, L. J.; Chen, R. T. Printable thermo-optic polymer switches utilizing imprinting and ink-jet printing. Opt. Express. 2013, 21, 2110-7.
66. Reddy, J. W.; Lassiter, M.; Chamanzar, M. Parylene photonics: a flexible, broadband optical waveguide platform with integrated micromirrors for biointerfaces. Microsyst. Nanoeng. 2020, 6, 85.
67. Sun, Y.; Wang, D.; Niu, H.; et al. Programmable photonic processors with MZI-cascaded-ring units for enhanced versatility. Photon. Res. 2025, 13, 2778.
68. Marchisio, A.; Da Ros, F.; Curri, V.; Carena, A.; Bardella, P. Comprehensive model of MZI-based circuits for photonic computing applications. Commun. Phys. 2025, 8, 2176.
69. Sun, C.; Chen, Z.; Ye, Y.; et al. Integrated microring spectrometer with in‐hardware compressed sensing to break the resolution‐bandwidth limit for general continuous spectrum analysis. Laser. Photonics. Rev. 2023, 17, 2300291.
70. Chen, F.; Chameh, H. M.; Movahed, M.; et al. Implantable nanophotonic neural probes for integrated patterned photostimulation and electrophysiological recording. npj. Biosensing. 2025, 2, 24.
71. Chen, F. D.; Sharma, A.; Xue, T.; et al. Implantable silicon neural probes with nanophotonic phased arrays for single-lobe beam steering. Commun. Eng. 2024, 3, 182.
72. Marchetti, R.; Lacava, C.; Carroll, L.; Gradkowski, K.; Minzioni, P. Coupling strategies for silicon photonics integrated chips [Invited]. Photon. Res. 2019, 7, 201.
73. Xue, T.; Stalmashonak, A.; Chen, F. D.; et al. Implantable photonic neural probes with out-of-plane focusing grating emitters. Sci. Rep. 2024, 14, 13812.
74. Segev, E.; Reimer, J.; Moreaux, L. C.; et al. Patterned photostimulation via visible-wavelength photonic probes for deep brain optogenetics. Neurophotonics 2017, 4, 011002.
75. Li, L.; Lin, H.; Qiao, S.; et al. Monolithically integrated stretchable photonics. Light. Sci. Appl. 2018, 7, 17138.
76. Chen, Z.; Li, L. Flexible photonic probes for new-generation brain–computer interfaces. Acc. Mater. Res. 2021, 2, 315-8.
77. Mu, X.; Chameh, H. M.; Movahed, M.; et al. Nanophotonic neural probes for in vivo photostimulation, electrophysiology, and microfluidic delivery. Microsyst. Nanoeng. 2026, 12, 100.
78. Yu, X.; Wu, Z.; Zeng, J.; Lin, S.; Cai, X.; Zhang, Y. 532 nm silicon nitride optical phased array and high-speed calibration and control system. Chin. Opt. Lett. 2025, 23, 061301.
79. Chul Shin, M.; Mohanty, A.; Watson, K.; et al. Chip-scale blue light phased array. Opt. Lett. 2020, 45, 1934-7.
80. Poulton, C. V.; Byrd, M. J.; Raval, M.; et al. Large-scale silicon nitride nanophotonic phased arrays at infrared and visible wavelengths. Opt. Lett. 2017, 42, 21-4.
81. McKay, E.; Pruiti, N. G.; May, S.; Sorel, M. High-confinement alumina waveguides with sub-dB/cm propagation losses at 450 nm. Sci. Rep. 2023, 13, 19917.
82. Hegeman, I.; Dijkstra, M.; García-Blanco, S. M. Low loss TiO2 channel waveguides. In Proceedings of the Integrated Optics: Devices, Materials, and Technologies XXIV, 2020.
83. Hegeman, I.; Dijkstra, M.; Segerink, F. B.; Lee, W.; Garcia-Blanco, S. M. Development of low-loss TiO2 waveguides. Opt. Express. 2020, 28, 5982-90.
84. Evans, C. C.; Liu, C.; Suntivich, J. Low-loss titanium dioxide waveguides and resonators using a dielectric lift-off fabrication process. Opt. Express. 2015, 23, 11160-9.
85. Corato-Zanarella, M.; Ji, X.; Mohanty, A.; Lipson, M. Absorption and scattering limits of silicon nitride integrated photonics in the visible spectrum. Opt. Express. 2024, 32, 5718-28.
86. Zhou, D.; Callori, G.; Vereecke, B.; et al. A 300mm silicon nitride photonic platform for ultra low loss in the visible spectrum. In Proceedings of the 2024 International Conference on Optical MEMS and Nanophotonics (OMN), San Sebastian, Spain. July 28 - Aug 01, 2024. IEEE; 2024. p. 1-2.
87. Shi, B.; Zheng, M. Y.; Hu, Y.; et al. A hyperfine-transition-referenced vector spectrum analyzer for visible-light integrated photonics. Nat. Commun. 2025, 16, 7025.
88. Yang, S.; Ding, Z.; Li, X.; et al. Visible to near-infrared light integrated photonic components on PECVD and LPCVD SiN platform. IEEE. Photonics. J. 2024, 16, 1-7.
89. Neutens, P.; Mafakheri, E.; Zheng, X.; et al. A 200 mm wafer-scale Al2O3 photonics waveguide technology for UV and visible applications. IEEE. Photonics. J. 2025, 17, 1-6.
90. Dullo, F. T.; Jayakumar, N.; Getz, M.; et al. Low-loss, low-background aluminum oxide waveguide platform for broad-spectrum on-chip microscopy. Opt. Lett. 2025, 50, 2159-62.
91. Yamaguchi, T.; Fushimi, N.; Hida, M.; et al. Optical waveguides and beam splitters using low-loss aluminum oxide for visible-wavelength photonics applications. Jpn. J. Appl. Phys. 2025, 64, 02SP32.
92. Shim, E.; Chen, Y.; Masmanidis, S.; Li, M. Multisite silicon neural probes with integrated silicon nitride waveguides and gratings for optogenetic applications. Sci. Rep. 2016, 6, 22693.
93. Lanzio, V.; Telian, G.; Koshelev, A.; et al. Small footprint optoelectrodes using ring resonators for passive light localization. Microsyst. Nanoeng. 2021, 7, 40.
94. Fu, T.; Zhang, J.; Sun, R.; et al. Optical neural networks: progress and challenges. Light. Sci. Appl. 2024, 13, 263.
95. Lin, S.; Zeng, J.; Lin, S.; Yu, S.; Zhang, Y. High-fidelity and compact topology architecture for large-scale reconfigurable linear optical networks. Adv. Photon. Nexus. 2025, 4, 066011.
96. Mu, X.; Chen, F. D.; Dang, K. M.; et al. Implantable photonic neural probes with 3D-printed microfluidics and applications to uncaging. Front. Neurosci. 2023, 17, 1213265.
97. Kampasi, K.; English, D. F.; Seymour, J.; et al. Dual color optogenetic control of neural populations using low-noise, multishank optoelectrodes. Microsyst. Nanoeng. 2018, 4, 10.
98. Kampasi, K.; Stark, E.; Seymour, J.; et al. Fiberless multicolor neural optoelectrode for in vivo circuit analysis. Sci. Rep. 2016, 6, 30961.
99. Parra, J.; Navarro-Arenas, J.; Sanchis, P. Silicon thermo-optic phase shifters: a review of configurations and optimization strategies. Adv. Photon. Nexus. 2024, 3, 044001.
100. Sanna, M.; Baldazzi, A.; Piccoli, G.; Azzini, S.; Ghulinyan, M.; Pavesi, L. SiN integrated photonic components in the visible to near-infrared spectral region. Opt. Express. 2024, 32, 9081-94.
101. Salatino, J. W.; Ludwig, K. A.; Kozai, T. D. Y.; Purcell, E. K. Glial responses to implanted electrodes in the brain. Nat. Biomed. Eng. 2017, 1, 862-77.
102. Le Floch, P.; Zhao, S.; Liu, R.; et al. 3D spatiotemporally scalable in vivo neural probes based on fluorinated elastomers. Nat. Nanotechnol. 2024, 19, 319-29.
103. Zhang, A.; Mandeville, E. T.; Xu, L.; Stary, C. M.; Lo, E. H.; Lieber, C. M. Ultraflexible endovascular probes for brain recording through micrometer-scale vasculature. Science 2023, 381, 306-12.
104. Johnston, I. D.; Mccluskey, D. K.; Tan, C. K. L.; Tracey, M. C. Mechanical characterization of bulk Sylgard 184 for microfluidics and microengineering. J. Micromech. Microeng. 2014, 24, 035017.
105. Luo, Y.; Sun, C.; Wei, M.; et al. Integrated flexible microscale mechanical sensors based on cascaded free spectral range-free cavities. Nano. Lett. 2023, 23, 8898-906.
106. Hassler, C.; von Metzen, R. P.; Ruther, P.; Stieglitz, T. Characterization of parylene C as an encapsulation material for implanted neural prostheses. J. Biomed. Mater. Res. B. Appl. Biomater. 2010, 93, 266-74.
107. Kobielarz, M.; Tomanik, M.; Mroczkowska, K.; et al. Laser-modified PLGA for implants: in vitro degradation and mechanical properties. Acta. Bioeng. Biomech. 2020, 22, 179-97.
108. Hopcroft, M. A.; Nix, W. D.; Kenny, T. W. What is the Young’s modulus of silicon? J. Microelectromech. Syst. 2010, 19, 229-38.
109. Khan, A.; Philip, J.; Hess, P. Young’s modulus of silicon nitride used in scanning force microscope cantilevers. J. Appl. Phys. 2004, 95, 1667-72.
110. Anderson, O.; Ottermann, C. R.; Kuschnereit, R.; Hess, P.; Bange, K. Density and Young’s modulus of thin TiO2 films. Fresenius. J. Anal. Chem. 1997, 358, 315-8.
111. Papakonstantinou, I.; Wang, K.; Selviah, D. R.; Fernández, F. A. Transition, radiation and propagation loss in polymer multimode waveguide bends. Opt. Express. 2007, 15, 669-79.
112. Fan, L.; Varghese, L. T.; Xuan, Y.; Wang, J.; Niu, B.; Qi, M. Direct fabrication of silicon photonic devices on a flexible platform and its application for strain sensing. Opt. Express. 2012, 20, 20564-75.
113. Chen, Z.; Shi, Y.; Wei, M.; et al. A universal approach to high‐index‐contrast flexible integrated photonics. Adv. Opt. Mater. 2023, 11, 2202824.
114. Michon, J.; Geiger, S.; Li, L.; et al. 3D integrated photonics platform with deterministic geometry control. Photon. Res. 2020, 8, 194.
115. Kim, Y. B.; Cho, J. W.; Lee, Y. J.; Bae, D.; Kim, S. K. High-index-contrast photonic structures: a versatile platform for photon manipulation. Light. Sci. Appl. 2022, 11, 316.
116. Robinson, J. T.; Preston, K.; Painter, O.; Lipson, M. First-principle derivation of gain in high-index-contrast waveguides. Opt. Express. 2008, 16, 16659-69.
117. Li, L.; Lin, H.; Qiao, S.; et al. Integrated flexible chalcogenide glass photonic devices. Nat. Photon. 2014, 8, 643-9.
119. Kim, D. H.; Ahn, J. H.; Choi, W. M.; et al. Stretchable and foldable silicon integrated circuits. Science 2008, 320, 507-11.
120. Bosman, E.; Van Steenberge, G.; Van Hoe, B.; Missinne, J.; Vanfleteren, J.; Van Daele, P. Highly reliable flexible active optical links. IEEE. Photon. Technol. Lett. 2010, 22, 287-9.
121. Yang, W.; Yang, H.; Qin, G.; et al. Large-area InP-based crystalline nanomembrane flexible photodetectors. Appl. Phys. Lett. 2010, 96, 121107.
122. Chen, Y.; Li, M. Integrated silicon and silicon nitride photonic circuits on flexible substrates. Opt. Lett. 2014, 39, 3449-52.
123. Chen, Y.; Li, H.; Li, M. Flexible and tunable silicon photonic circuits on plastic substrates. Sci. Rep. 2012, 2, 622.
124. Ko, H. C.; Stoykovich, M. P.; Song, J.; et al. A hemispherical electronic eye camera based on compressible silicon optoelectronics. Nature 2008, 454, 748-53.
125. Notaros, M.; Dyer, T.; Garcia Coleto, A.; et al. Mechanically-flexible wafer-scale integrated-photonics fabrication platform. Sci. Rep. 2024, 14, 10623.
126. Xu, Z.; Dai, S.; Liu, C.; Wu, Z.; Xu, L. Investigation of the Ga-Sb-S chalcogenide glass with low thermo-optic coefficient as an acousto-optic material. Ceram. Int. 2022, 48, 21663-70.
127. Wu, Y.; Bao, K.; Liang, J.; et al. Photonic interfaces: an innovative wearable sensing solution for continuous monitoring of human motion and physiological signals. Small. Methods. 2025, 9, e2500727.
128. Chen, S.; Fan, Y.; Li, H.; et al. Meta-device for sensing subwavelength lateral displacement. Light. Sci. Appl. 2026, 15, 68.
129. Chen, Q.; Qu, G.; Yin, J.; et al. Highly efficient vortex generation at the nanoscale. Nat. Nanotechnol. 2024, 19, 1000-6.
130. Shen, W.; Du, J.; Xu, K.; He, Z. On-chip selective dual-mode switch for 2-μm wavelength high-speed optical interconnection. IEEE. Photon. Technol. Lett. 2021, 33, 483-6.
131. Sun, S.; Che, Y.; Xie, Y.; et al. Multimode optical switch based on cascaded Mach-Zehnder interferometer waveguides. Opt. Lett. 2023, 48, 5336-9.
132. Lin, B.; Wang, X.; Lv, J.; et al. Low-power-consumption polymer Mach-Zehnder interferometer thermo-optic switch at 532 nm based on a triangular waveguide. Opt. Lett. 2020, 45, 4448-51.
133. Sun, S.; Yu, Q.; Che, Y.; et al. Mode-insensitive and mode-selective optical switch based on asymmetric Y-junctions and MMI couplers. Photon. Res. 2024, 12, 423.
134. Chen, Z.; Li, X.; Tang, Y.; et al. Implantation-assistance-free flexible waveguide probe for optogenetic stimulation. Cell. Rep. Phys. Sci. 2024, 5, 102217.
135. Singer, J. A.; Stramm, T.; Fasel, J.; et al. Flexible polymer optical waveguides for integrated optogenetic brain implants. In Proceedings of the 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), Munich, Germany, Jan 15-19, 2023. IEEE; 2023. pp. 370-3.
136. Yamagiwa, S.; Ishida, M.; Kawano, T. Flexible optrode array: parylene-film waveguide arrays with microelectrodes for optogenetics. In Proceedings of the 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, USA. Jun 21-25, 2015. IEEE; 2015. pp. 277-80.
137. Reddy, J. W.; Jain, V.; Guessaymi, N.; Malekoshoaraie, M. H.; Chamanzar, M. In vivo optogenetic stimulation using Parylene photonic waveguides for light delivery. In Optogenetics and Optical Manipulation 2023. SPIE; 2023. pp. 1236607.
138. Zhang, W.; Zhou, X.; He, Y.; Xu, L.; Xie, J. Implanting mechanics of PEG/DEX coated flexible neural probe: impacts of fabricating methods. Biomed. Microdevices. 2021, 23, 17.
139. Ye, Z.; Qi, J.; Ni, Y.; Wu, Z.; Xiao, X.; Xiong, S. A tassel-type multilayer flexible probe for invasive neural recording. Chip 2022, 1, 100024.
140. Guan, S.; Wang, J.; Gu, X.; et al. Elastocapillary self-assembled neurotassels for stable neural activity recordings. Sci. Adv. 2019, 5, eaav2842.
141. Tien, L. W.; Wu, F.; Tang‐Schomer, M. D.; Yoon, E.; Omenetto, F. G.; Kaplan, D. L. Silk as a multifunctional biomaterial substrate for reduced glial scarring around brain‐penetrating electrodes. Adv. Funct. Mater. 2013, 23, 3185-93.
142. Cointe, C.; Laborde, A.; Nowak, L. G.; et al. Scalable batch fabrication of ultrathin flexible neural probes using a bioresorbable silk layer. Microsyst. Nanoeng. 2022, 8, 21.
143. Xiang, Z.; Yen, S.; Xue, N.; et al. Ultra-thin flexible polyimide neural probe embedded in a dissolvable maltose-coated microneedle. J. Micromech. Microeng. 2014, 24, 065015.
144. Na, K.; Sperry, Z. J.; Lu, J.; et al. Novel diamond shuttle to deliver flexible neural probe with reduced tissue compression. Microsyst. Nanoeng. 2020, 6, 37.
145. Luan, L.; Wei, X.; Zhao, Z.; et al. Ultraflexible nanoelectronic probes form reliable, glial scar-free neural integration. Sci. Adv. 2017, 3, e1601966.
146. Cho, I. J.; Baac, H. W.; Yoon, E. A 16-site neural probe integrated with a waveguide for optical stimulation. In Proceedings of the 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Hong Kong, China. Jan 24-28, 2010. IEEE; 2010. pp. 995-8.
147. Driscoll, N.; Antonini, M. J.; Cannon, T. M.; et al. Multifunctional neural probes enable bidirectional electrical, optical, and chemical recording and stimulation in vivo. Adv. Mater. 2025, 37, e2408154.
148. Fu, R.; Luo, W.; Nazempour, R.; et al. Implantable and biodegradable poly(L‐lactic acid) fibers for optical neural interfaces. Adv. Opt. Mater. 2018, 6, 1700941.
149. Welkenhuysen, M.; Hoffman, L.; Luo, Z.; et al. An integrated multi-electrode-optrode array for in vitro optogenetics. Sci. Rep. 2016, 6, 20353.
150. Libbrecht, S.; Hoffman, L.; Welkenhuysen, M.; et al. Proximal and distal modulation of neural activity by spatially confined optogenetic activation with an integrated high-density optoelectrode. J. Neurophysiol. 2018, 120, 149-61.
151. Cho, Y. U.; Lee, J. Y.; Jeong, U.; et al. Ultra‐low cost, facile fabrication of transparent neural electrode array for electrocorticography with photoelectric artifact‐free optogenetics. Adv. Funct. Mater. 2022, 32, 2105568.
152. Kozai, T. D.; Vazquez, A. L. Photoelectric artefact from optogenetics and imaging on microelectrodes and bioelectronics: new challenges and opportunities. J. Mater. Chem. B. 2015, 3, 4965-78.
153. Garner, S.; Glaesemann, S.; Li, X. Ultra-slim flexible glass for roll-to-roll electronic device fabrication. Appl. Phys. A. 2014, 116, 403-7.
154. Xiong, F.; Liu, L.; Peng, H. Reconstruction of a connectome of single neurons in mouse brains by cross-validating multi-scale multi-modality data. Nat. Methods. 2025, 22, 2670-83.
155. Kobayashi, T.; Shimba, K.; Narumi, T.; Asahina, T.; Kotani, K.; Jimbo, Y. Revealing single-neuron and network-activity interaction by combining high-density microelectrode array and optogenetics. Nat. Commun. 2024, 15, 9547.
156. Chen, C.; Kong, D.; Tao, Y.; et al. Half-wavelength-pitch silicon optical phased array with a 180° field of view, high sidelobe suppression ratio, and complex-pattern beamforming. Optica 2024, 11, 1575.
157. Guo, J.; Zhang, W.; Liao, Z.; Zhang, C.; Yu, Y.; Zhang, X. Multi-beam top-facing optical phased array enabling a 360° field of view. Photon. Res. 2025, 13, 889.
158. Chen, T.; Dang, Z.; Deng, Z.; Ke, S.; Ding, Z.; Zhang, Z. Large-scale optical switches by thermo-optic waveguide lens. PhotoniX 2024, 5, 131.
159. Chen, T.; Ding, Z.; Dang, Z.; Zhang, Z. 360° beam steerer by thermo-optic waveguide lens and facet refraction. Opt. Laser. Technol. 2025, 184, 112425.
160. Wang, X.; Xu, M.; Yang, H.; et al. Ultraflexible neural electrodes enabled synchronized long-term dopamine detection and wideband chronic recording deep in brain. ACS. Nano. 2024, 18, 34272-87.
161. Liu, C.; Zhao, Y.; Cai, X.; et al. A wireless, implantable optoelectrochemical probe for optogenetic stimulation and dopamine detection. Microsyst. Nanoeng. 2020, 6, 64.
162. Liang, D.; Bowers, J. E. Recent progress in heterogeneous III-V-on-silicon photonic integration. Light. Adv. Manuf. 2021, 2, 59-83.
163. Weng, H. C.; Monroy-Ruz, J.; Matthews, J. C. F.; Rarity, J. G.; Balram, K. C.; Smith, J. A. Heterogeneous integration of solid-state quantum systems with a foundry photonics platform. ACS. Photonics. 2023, 10, 3302-9.
164. Yu, C.; Zhang, M.; Liang, L.; et al. Advancements in transfer printing techniques and their applications in photonic integrated circuits. Light. Sci. Appl. 2025, 14, 396.
165. Silva, P.; Jacinto, L. Wireless devices for optical brain stimulation: a review of current developments for optogenetic applications in freely moving mice. Cell. Mol. Bioeng. 2025, 18, 1-13.
166. Martínez, N.; Ozbek, B.; Liu, Y.; et al. A SoC for an active implantable microsystem for closed-loop optogenetic neuromodulation. In Proceedings of the 2025 IEEE International Symposium on Circuits and Systems (ISCAS), Longdon, UK. May 25-28, 2025. IEEE; 2025. p. 1-5.
167. Firfilionis, D.; Hutchings, F.; Tamadoni, R.; et al. A closed-loop optogenetic platform. Front. Neurosci. 2021, 15, 718311.
168. Liu, M.; Zhang, W.; Han, S.; et al. Multifunctional conductive and electrogenic hydrogel repaired spinal cord injury via immunoregulation and enhancement of neuronal differentiation. Adv. Mater. 2024, 36, e2313672.
169. Lassoued, A.; Zhang, F.; Kurokawa, K.; et al. Cone photoreceptor dysfunction in retinitis pigmentosa revealed by optoretinography. Proc. Natl. Acad. Sci. U. S. A. 2021, 118, e2107444118.
170. Chu, X. L.; Song, X. Z.; Li, Q.; et al. Basic mechanisms of peripheral nerve injury and treatment via electrical stimulation. Neural. Regen. Res. 2022, 17, 2185-93.
171. Wang, Y.; Li, Q.; Tao, B.; et al. Fibroblasts in heart scar tissue directly regulate cardiac excitability and arrhythmogenesis. Science 2023, 381, 1480-7.
172. Lin, Z.; Kireev, D.; Liu, N.; et al. Graphene biointerface for cardiac arrhythmia diagnosis and treatment. Adv. Mater. 2023, 35, e2212190.
173. Pesantez Torres, F.; Manning, A.; Paredes-Espinosa, M. B.; et al. 3D flexible self-folding microelectrode array for organoid electrophysiology analysis. Cell. Biomater. 2025, 1, 100179.
